Pressure sensor device and pressure sensor cell thereof

Details Pressure sensor device and pressure sensor cell thereof Pressure sensor device and pressure sensor cell thereof

2008-05-13

2008-05-13

Allen, Anore J. (Department: 2855)

Measuring and testing

Fluid pressure gauge

Electrical

C073S715000, C073S723000, C073S753000

Reexamination Certificate

active

07370536

ABSTRACT:
A pressure sensor device includes a pressure sensor cell that includes a sensor chip having a diaphragm with piezo-resistors, an amplifying circuit, and various adjusting circuits, and a base member to which the sensor chip is joined, with the diaphragm facing a through hole of the base member. The base member and a metallic member are joined together with a joining member so that their respective through holes communicate with each other. A protective film or filler covers the joining member between the base member and the metallic pipe member. The metallic pipe member is bonded to a resin case, and a signal terminal of the resin case and the pressure sensor chip are electrically connected together by wire bonding, thus forming a pressure sensor cell. The metallic pipe member protrudes beyond an end face of the resin case to support load.

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