Pressure sensor

Details Pressure sensor Pressure sensor

1990-05-30

1991-12-10

Woodiel, Donald O.

Measuring and testing

Fluid pressure gauge

Diaphragm

338 4, G01L 708, G01L 906

Patent

active

050707353

ABSTRACT:
A silicon membrane pressure sensor which has a carrier chip and a membrane chip 3 for which overload protection is desired to protect against the pressure on the front side of the membrane. An overload member 7 is mounted between the carrier chip 2 and the membrane chip 3 such that the overload member is connected to the membrane chip at a middle island portion 5 of the membrane chip 3 and with a first distance D1 from the carrier chip 2 in the non-loaded condition such that when pressure occurs the overload member will remove the load on the membrane chip.

REFERENCES:
patent: 4028945 (1977-06-01), Bergamini
patent: 4135408 (1979-01-01), DiGiovanni
patent: 4649363 (1987-03-01), Starr
patent: 4761210 (1988-08-01), Ehrler et al.
Japanese Abstract of Japan 58-151536, vol. 7, No. 270, (P-240) Dec. 2, 1983, 1415.

Affiliated with

Also associated with

Rating

Pressure sensor does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Pressure sensor, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Pressure sensor will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-1032500