Coating apparatus – Gas or vapor deposition – Chamber seal
Reexamination Certificate
2006-02-21
2006-02-21
Hassanzadeh, Parviz (Department: 1763)
Coating apparatus
Gas or vapor deposition
Chamber seal
C118S718000, C118S719000, C156S345310, C220S240000
Reexamination Certificate
active
07001468
ABSTRACT:
A closure assembly coupled to a vessel including a chamber and an access port in communication with the chamber, the closure assembly comprising: a door assembly coupled to the vessel and configured to move between an open position and a closed position, the door assembly in contact with the access port at a first location thereby sealing the chamber in the closed position, wherein pressure within the chamber applies a force to the door assembly at the first location. An actuator in moveable contact with the door assembly at a second location, the actuator configured to apply a counteracting force to the door assembly at the second location in response to pressure within the chamber to maintain the door assembly in the closed position. The actuator moves between a non-actuated and actuated position within an actuator bore, the actuator in the actuated position when a desired amount of pressure is applied to the actuator bore.
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Hassanzadeh Parviz
Haverstock & Owens LLP
Moore Karla
Tokyo Electron Limited
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