Measuring and testing – Fluid pressure gauge – Diaphragm
Patent
1996-11-20
1999-11-30
Oen, William L.
Measuring and testing
Fluid pressure gauge
Diaphragm
73724, G01L 912
Patent
active
059922400
ABSTRACT:
A capacitance-based pressure detecting apparatus detects a pressure applied to a diaphragm based on a capacitance which varies depending on the change in portion of the diaphragm. The pressure detecting apparatus comprises a diaphragm which changes position depending on a differential pressure between a first pressure and a second pressure, a first electrode which is provided opposite a first plane of the diaphragm and forms, together with the diaphragm, a first capacitor, a second electrode which is provided opposite a second plane of the diaphragm and forms, together with the diaphragm, a second capacitor, a third capacitor altering a capacitance according to the first pressure, a detecting unit for detecting the capacitance of the first through third capacitors, and an operation unit for obtaining a pressure applied to the diaphragm based on the capacitance of the first and second capacitors, and amending the obtained pressure based on the capacitance of the third capacitor.
REFERENCES:
patent: 4445383 (1984-05-01), Binder et al.
patent: 4625560 (1986-12-01), Sanders
patent: 4670733 (1987-06-01), Bell
patent: 4741214 (1988-05-01), Vidmantas
Silicon Diaphragm Capacitive Vacuum Sensor-K. Hatanaka et al.; Technical Digest of the 13th Sensor Symposium, 1995; pp. 37-40 (no month).
Smart Pressure Sensors for Industrial Applications -Moore; Sensors, Jun. 1995; pp. 32, 33, 48 and 49 (no month).
Kato Nobuhisa
Kudo Takahiro
Nakamura Kimihiro
Takahashi Masato
Tsukamoto Shuji
Fuji Electric & Co., Ltd.
Oen William L.
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