Pressure control method and processing device

Details Pressure control method and processing device Pressure control method and processing device

2005-04-11

2009-06-30

Olsen, Allan (Department: 1792)

Semiconductor device manufacturing: process

Chemical etching

Vapor phase etching

Reexamination Certificate

active

07553773

ABSTRACT:
First and second pressure sensors132and134that perform pressure detection over different pressure detection ranges from each other detect the pressure within a process chamber102of an etching device100. A pressure controller144selects optimal pressure data in correspondence to the pressure inside the process chamber from the pressure data provided by the first and second pressure sensors132and134. It also analyzes the selected pressure data at a resolution selected in correspondence to the pressure inside the process chamber102and thus obtains pressure data achieving a predetermined data density. The pressure controller134controls a pressure control valve130so as to ensure that the pressure data match preset pressure data.

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English Translation of International Preliminary Examination Report, Feb. 7, 2002.

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