Pressure control apparatus and method of establishing a...

Details Pressure control apparatus and method of establishing a... Pressure control apparatus and method of establishing a...

2006-05-30

2006-05-30

Zervigon, Rudy (Department: 1763)

Adhesive bonding and miscellaneous chemical manufacture

Differential fluid etching apparatus

With measuring, sensing, detection or process control means

C118S688000, C118S692000, C118S715000, C118S719000, C156S345260

Reexamination Certificate

active

07052576

ABSTRACT:
A desired level of pressure is established in at least one chamber that forms part of a closed atmosphere, such as in a semiconductor device processing facility. A pressure control system includes at least one space increase/decrease device that has a partition which is movable to increase and/or decrease the volume of free space within the chamber(s), a pressure sensor for detecting the pressure within the chamber(s), and a controller for controlling the movement of the partition based on the detected pressure. A chamber is provided with positive or negative pressure to increase or decrease the pressure therein while the pressure in the chamber is monitored. As soon as the pressure within the chamber equals a predetermined pressure, the providing of the positive or negative pressure is stopped. The partition is moved to vary the effective volume of free space in the chamber(s) to change the pressure in the chamber from the predetermined pressure to the desired pressure.

REFERENCES:
patent: 5009738 (1991-04-01), Gruenwald et al.
patent: 5423936 (1995-06-01), Tomita et al.
patent: 5928963 (1999-07-01), Koshiishi
patent: 6228170 (2001-05-01), Chen et al.
patent: 2002/0129768 (2002-09-01), Carpenter et al.

Affiliated with

Also associated with

Rating

Pressure control apparatus and method of establishing a... does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Pressure control apparatus and method of establishing a..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Pressure control apparatus and method of establishing a... will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-3562898