Preparation of thin free-standing diamond films

Plastic and nonmetallic article shaping or treating: processes – Laser ablative shaping or piercing

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264162, H01L 21302

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active

054909635

ABSTRACT:
A process for shaping a thin, free-standing diamond film having a rough growth surface. The process includes the steps of: cutting the rough growth surface of said film with a laser to form a plurality of first ridges; translating said film in a direction parallel to said surface or rotating said film along an axis of rotation perpendicular to said surface; repeating said cutting to form a plurality of second ridges; and lapping said growth surface to reduce the height of said second ridges. The laser utilized may be a Nd:YAG laser and may be continuous or pulsed.

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patent: 5294381 (1994-03-01), Iguchi et al.
S. Jin et al., Massive thinning of diamond films by a diffusion process, Apr. 20, 1992.
S. Jin et al., Polishing of CVD diamond by diffusional reaction with manganese powder, 1992.
Masanori Yoshikawa, Application of CVD Diamond to Tools and Machine Components, 1991, pp. 1 and 23-29.

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