Preparation of olefin SO.sub.2 copolymer electron beam resist fi

Details Preparation of olefin SO.sub.2 copolymer electron beam resist fi Preparation of olefin SO.sub.2 copolymer electron beam resist fi

1975-01-09

1976-01-27

Newsome, J. H.

Coating processes

Electrical product produced

Integrated circuit, printed circuit, or circuit board

96 351, 96 362, 96 48R, 96115R, 20415914, 260 793A, 346 74CR, 346135, 427 44, 427273, 427350, B05D 306, G11B 900

Patent

active

039353311

ABSTRACT:
In preparing an electron beam resist film of a copolymer of an olefin and SO.sub.2, the steps of removing insoluble particles, drying the films under high vacuum and storing them in a moisture-free atmosphere are required to prevent cracking of the films during development.

REFERENCES:
patent: 3576791 (1971-04-01), Holler et al.
patent: 3723591 (1973-03-01), Bauer et al.
patent: 3884696 (1975-05-01), Bowden et al.
Thomspson et al. "J. Electrochem. Soc." Vol. 120 No. 12 Dec. 1973 pp. 1722-1726.

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