Preparation of material for examination by transmission electron

Details Preparation of material for examination by transmission electron Preparation of material for examination by transmission electron

1980-05-19

1982-07-20

Anderson, Bruce C.

Radiant energy

Inspection of solids or liquids by charged particles

Methods

250311, G01N 2300

Patent

active

043408150

ABSTRACT:
Method and apparatus for preparing a specimen for observation under the electron microscope by ion erosion. A saddle-field ion source is employed to irradiate the specimen with the specimen held in close proximity spacing with respect to the cathode aperture of the ion source. Such close proximity spacing ensures that the specimen is thinned at a rapid rate comparable with the rates attained with chemical etching.

REFERENCES:
patent: 3206598 (1965-09-01), Wegmann
patent: 3548189 (1970-12-01), Meinel et al.
patent: 3699334 (1972-10-01), Cohen et al.
patent: 3944873 (1976-03-01), Franks et al.
patent: 4128765 (1978-12-01), Franks

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