Radiant energy – Inspection of solids or liquids by charged particles – Analyte supports
Reexamination Certificate
2008-07-01
2008-07-01
Wells, Nikita (Department: 2881)
Radiant energy
Inspection of solids or liquids by charged particles
Analyte supports
C250S304000, C250S307000, C250S311000
Reexamination Certificate
active
07394075
ABSTRACT:
In one embodiment, a sample of an integrated circuit device is prepared for observation in a transmission electron microscope (TEM). The sample may be placed on a surface formed by vertical edges of several TEM grids. The sample may be affixed to a vertical edge of one of the TEM grids. The TEM grid supporting the sample may be separated from the other TEM grids, and then placed in the TEM so that the sample may be observed.
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Cypress Semiconductor Corporation
Okamoto & Benedicto LLP
Smith II Johnnie L
Wells Nikita
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