Preparation of epitaxial rare earth thin films

Details Preparation of epitaxial rare earth thin films Preparation of epitaxial rare earth thin films

1978-10-30

1981-01-27

Bernstein, Hiram

Adhesive bonding and miscellaneous chemical manufacture

Delaminating processes adapted for specified product

Delaminating in preparation for post processing recycling step

156DIG63, C30B 2306

Patent

active

042473594

ABSTRACT:
A method of preparing epitaxial thin films of metallic rare earth garnets by chemical vapor deposition utilizes organometallic ligand compounds of rare earth metals including scandium, yttrium, lanthanum and the lanthanides (Z=58 through 71) with organic compounds including acetylacetone, benzoylacetone, thenoyl trifluoroacetone, fluorinated benzoylacetone, tri-n-butylphosphate, tri-n-octylphosphine oxide and sodium cyclopentadienide and 2,2,6,6-tetramethyl 3,5-heptanedione.

REFERENCES:
patent: 3131082 (1964-04-01), Gambino
patent: 3131082 (1964-04-01), Gambino
patent: 3326948 (1967-06-01), Cais et al.
patent: 3615168 (1971-10-01), Wehmeier
patent: 3856582 (1974-12-01), Smeiggil et al.
Encyclopedia Britannica V. III Micropaedia, William Benton Pub.

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