Radiant energy – Inspection of solids or liquids by charged particles – Methods
Patent
1989-12-01
1991-07-02
Berman, Jack I.
Radiant energy
Inspection of solids or liquids by charged particles
Methods
250309, 2504921, 2504922, 2504923, H01J 3730
Patent
active
050287800
ABSTRACT:
The method of preparing and observing a microsection utilizes a focused ion beam device composed of an ion tube for producing a scanned and focused ion beam, a sample stage including an XY displacement mechanism and an inclination mechanism, a gas gun for injecting deposition material gas onto a surface of a sample and a secondary charged particle detector such that the focused ion beam device has three functions, i.e., a scanning ion microscope function, a maskless etching function and a maskless deposition function. The method is directed to sequentially carry out highly accurate preparation of a section in a particular area of the sample and observation of the prepared section according to first step of determining a position of the cutting edge on the sample surface by the scanning ion microscope function, a second step of depositing a film locally on an area containing the cutting edge position by the maskless deposition function, a third step of forming a rectangular groove by the maskless etching function such that one sidewall of the rectangular groove is registered with the cutting edge so as to prepare and expose a section, a fourth step of inclining the sample stage to face the section in an observation direction, and a fifth step of carrying out observation of the section in the formed groove by the scanning ion microscope function.
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Adachi Tatsuya
Kaito Takashi
Berman Jack I.
Nguyen Kiet T.
Seiko Instruments Inc.
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