Preferential etchant for aluminium oxide

Details Preferential etchant for aluminium oxide Preferential etchant for aluminium oxide

1975-10-20

1978-05-02

Goolkasian, John T.

Compositions

Etching or brightening compositions

156656, 156667, 252 794, 427 88, 427309, C09K 1300, C09K 1306, H01L 21465

Patent

active

040873676

ABSTRACT:
A method of etching aluminium oxide and/or cleaning aluminium surfaces with an etchant consisting of a solution of a fluoride in an organic solvent, which solution is substantially free from hydrofluoric acid and unbound water.

REFERENCES:
patent: 2867514 (1959-01-01), Newhard
patent: 2883311 (1959-04-01), Halpert
patent: 3479237 (1969-11-01), Bergh
patent: 3634262 (1972-01-01), Grunwald
patent: 3767492 (1973-10-01), MacRae
patent: 3867218 (1975-02-01), Henry
patent: 3920471 (1975-11-01), Jones
patent: 3930870 (1976-01-01), Basi
patent: 3932685 (1976-01-01), Flowers
Chemical Abs., vol. 79, p. 284, Akira et al., "Etching Solution . . . Circuits; " No. 130635c.
Augurtyn et al., Chem. Abs., vol. 56, p. 4359(b), "Investigations on the Reaction . . . Hydrofluoride", (1961).

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