Precursors and processes for making metal oxides

Details Precursors and processes for making metal oxides Precursors and processes for making metal oxides

1993-10-06

1996-05-07

Nazario-Gonzales, Porfirio

Organic compounds -- part of the class 532-570 series

Organic compounds

Heavy metal containing

556 31, 534 16, 4271263, 427226, C07F 1900, C07F 500, B05D 302, B05D 512

Patent

active

055148220

ABSTRACT:
A first metal, an alcohol, and a carboxylic acid are reacted to form a metal alkoxycarboxylate which is then reacted with an alkoxide and/or a carboxylate of a second metal to form a precursor. Alternatively, a metal carboxylate and a metal alkoxide are combined and heated to form a precursor. In either alternative, the precursor includes all or most of the metal-oxygen-metal bonds of a desired metal oxide and a carboxylate ligand. The precursor is applied to a substrate, dried and annealed to form the metal oxide, such as BST. The metal-oxygen-metal bonds in the precursor permit the desired metal oxide to be formed from the precursor in one step, providing excellent thin films suitable for integrated circuits. The carboxylate ligand provides stability to the precursor allowing it to be stored for periods common in large scale manufacturing.

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