Precured split hinge for photomask assembly

Details Precured split hinge for photomask assembly Precured split hinge for photomask assembly

1984-06-15

1986-04-22

Epstein, Henry F.

Stock material or miscellaneous articles

Mass transmissive of light through all layers and having...

16225, 16DIG13, 156 99, 156106, 428101, 428428, 428429, 430321, B32B 1706, B44F 106, G03B 2704

Patent

active

045842167

ABSTRACT:
Hinged glass photomask assemblies for photolithographic processes are disclosed wherein a flexible polymeric split hinge is used to join glass plates thereby providing for greater flexibility of the phototool.

REFERENCES:
patent: 3927943 (1975-12-01), Pohl et al.
patent: 4032233 (1977-06-01), Oscarsson et al.
patent: 4043354 (1977-08-01), Brown
patent: 4144066 (1979-03-01), Ernsberger
patent: 4147380 (1979-04-01), Nelson
patent: 4155735 (1979-05-01), Ernsberger
patent: 4183554 (1980-01-01), Howard, Jr.
patent: 4412739 (1983-11-01), Freiberg
patent: 4446184 (1984-05-01), Bowser
patent: 4469353 (1984-09-01), Anarwala

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