Precision polishing apparatus with detecting means

Details Precision polishing apparatus with detecting means Precision polishing apparatus with detecting means

1997-05-05

2000-01-11

Eley, Timothy V.

Abrading

Precision device or process - or with condition responsive...

With indicating

451 41, 451 54, 451 67, 451287, 451451, B24B 4900

Patent

active

060129662

ABSTRACT:
In order to reclaim defective articles, wafers carried in from a loading unit are transported to a wafer stocker unit, a polishing unit, a pre-rinsing unit, a rinsing unit, a spin dehydrating unit and a drying unit in the named order, and in a defect inspecting device, defective articles are sorted and the remainder are taken out as products out of an unloading unit. The defective articles are classified in a discriminating device in conformity with the kinds of the defects thereof, and are returned to the polishing unit, the rinsing unit or the drying unit through a return duct.

REFERENCES:
patent: 4956944 (1990-09-01), Ando et al.
patent: 5399233 (1995-03-01), Murazumi et al.

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