Precision machining apparatus and precision machining method

Details Precision machining apparatus and precision machining method Precision machining apparatus and precision machining method

2007-07-24

2007-07-24

Morgan, Eileen P. (Department: 3723)

Abrading

Precision device or process - or with condition responsive...

With indicating

C451S011000, C451S246000

Reexamination Certificate

active

11316886

ABSTRACT:
A precision machining apparatus and a precision machining method capable of carrying out grinding with accuracy by performing switching control, for example, on a device for rotating a grinding wheel according to grinding stages through the amount of movement and constant pressure changed stepwise. To a second pedestal3supporting a rotary device6bfor rotating a grinding wheel b, an actuator5and a feed screw mechanism4constituted by at least a feed screw41and a nut42are attached. In a rough grinding stage, the movement of the rotary device6band the second pedestal3is adjusted through a predetermined amount of movement of the nut42. In a super-precision grinding stage, the movement of the rotary device6band the second pedestal3is adjusted by pressure control using stepwise a plurality of pneumatic actuators5a, 5bdiffering in pressure performance. An attitude control device7is interposed between a first pedestal2and a rotary device6afor rotating an object a to be ground.

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