Precision electrostatic lens system and method of manufacture

Details Precision electrostatic lens system and method of manufacture Precision electrostatic lens system and method of manufacture

1992-11-25

1993-08-31

Berman, Jack I.

Radiant energy

With charged particle beam deflection or focussing

Magnetic lens

3133601, 3133611, H01J 318

Patent

active

052411826

ABSTRACT:
A precision electrostatic lens system is formed from lens electrodes having high precision inner bores by aligning said bores on a ceramic rod, inserting segmented glass spacers between adjacent electrodes, and brazing the combination together to provide a monolithic structure capable of maintaining accurate tolerances.

REFERENCES:
patent: 2759117 (1956-08-01), Hasbrouck
patent: 4556798 (1985-12-01), McKenna et al.
patent: 4725736 (1988-02-01), Crewe
patent: 4740705 (1988-04-01), Crewe
patent: 4760567 (1988-07-01), Crewe
patent: 4833362 (1989-05-01), Crewe
Van Nostrand's Encyclopedia, 5th Ed., 1976, p. 359.

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