Precision capacitor array

Details Precision capacitor array Precision capacitor array

1997-02-18

1998-11-17

Martin-Wallace, Valencia

Active solid-state devices (e.g., transistors, solid-state diode

Gate arrays

With particular signal path connections

257306, 257307, 257754, 257756, 257774, 257920, H01L 2710

Patent

active

058380329

ABSTRACT:
Capacitor arrays may be incorporated within silicon integrated circuits as part of analog-to-digital or digital-to-analog converters. Capacitance ratios between individual capacitors need to be controlled to better than 1%. Because of microloading effects during etching, the areas of the electrodes of the capacitors located along the edges of the array have tended to be slightly less than the areas of electrodes located completely inside the array. The present invention solves this problem by providing additional electrodes located along the periphery of the array, spaced the same distance away from the array edge as the spacing between electrodes inside the array.

REFERENCES:
patent: 4149302 (1979-04-01), Cook
patent: 4729063 (1988-03-01), Matsuo et al.
patent: 5066997 (1991-11-01), Sakurai et al.
patent: 5322438 (1994-06-01), McNutt et al.
patent: 5391914 (1995-02-01), Sullivan et al.
patent: 5396092 (1995-03-01), Peek
patent: 5404045 (1995-04-01), Mizushima

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