Radiation imagery chemistry: process – composition – or product th – Imaging affecting physical property of radiation sensitive... – Making named article
Reexamination Certificate
2006-04-18
2006-04-18
McPherson, John A. (Department: 1756)
Radiation imagery chemistry: process, composition, or product th
Imaging affecting physical property of radiation sensitive...
Making named article
C216S002000, C216S024000
Reexamination Certificate
active
07029830
ABSTRACT:
Aperture members are provided wherein there is thin 1–10 micrometer thick crystaline membrane that is surrounded by a frame of a bulk type crystalline material. The aperture being an opening through the membrane in a typical shape useful for device fabrication, such as a circle or pattern. The aperture member of the invention can be fabricated out of a typical silicon crystalline wafer in a process where doping in a region serves as an etch stop.
REFERENCES:
patent: 5972794 (1999-10-01), Katakura
patent: 2001/0016294 (2001-08-01), Yahiro
patent: 11-168049 (1999-06-01), None
Computer-generated translation of JP 11-168049 with abstract, Norihiro, Jun. 1999.
Cordes Michael James
Cordes Steven Alan
Mansfield Scott
Speidell James Louis
Beck Thomas A.
McPherson John A.
Morris Daniel P.
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