Power trench DMOS with large active cell density

Active solid-state devices (e.g. – transistors – solid-state diode – Field effect device – Having insulated electrode

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257341, 257335, H01L 2910

Patent

active

059819995

ABSTRACT:
A design for a trench DMOS transistor having improved current carrying capability is presented. The principal improvement lies in the periodic replacement of the individual cells in the array with a protection cell of a different size. When this is done it becomes possible to significantly increase the density of cells per unit area. This results in a corresponding improvement in the amount of channel area available to the device and hence an increase in its current carrying capability.

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Williams et al., A 1 Million-Cell 2.0 M-ohm 30-V Trench FET Utilizing 32 Mcell/in 2 Density with Distributed Voltage Clamping, IEDM 97 -- pp. 363-366.

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