Power measurement mechanism for a transformer coupled plasma...

Details Power measurement mechanism for a transformer coupled plasma... Power measurement mechanism for a transformer coupled plasma...

2006-02-28

2006-02-28

Nguyen, Vinh P. (Department: 2829)

Electricity: measuring and testing

Measuring, testing, or sensing electricity, per se

Magnetic saturation

Reexamination Certificate

active

07005845

ABSTRACT:
An apparatus is described. The apparatus includes a vacuum chamber and an electrical transformer to induce an electromagnetic field within the vacuum chamber. The transformer includes a primary winding, a secondary winding formed by the plasma loop, and a separate secondary winding implemented to measure the voltage along the plasma loop. The apparatus also includes a current transformer to measure the current flow through the plasma loop.

REFERENCES:
patent: 4431898 (1984-02-01), Reinberg et al.
patent: 6432260 (2002-08-01), Mahoney et al.
patent: 6819096 (2004-11-01), Gonzalez et al.

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