Active solid-state devices (e.g. – transistors – solid-state diode – Field effect device – Having insulated electrode
Patent
1996-05-30
1999-08-17
Loke, Steven H.
Active solid-state devices (e.g., transistors, solid-state diode
Field effect device
Having insulated electrode
257350, 257500, 257501, 257503, 257508, H01L 2701, H01L 2712, H01L 2900
Patent
active
059397551
ABSTRACT:
A power IC having an SOI structure including at least a supporting substrate as a bottom layer, a substrate insulating film, an SOI conductive film, an SOI insulating film, and an Si film. The Si film serving as a top layer of the SOI structure is divided into a plurality of active layers by element isolation dielectric regions, and a desired semiconductor element is formed in each active layer. A total capacitance between each active layer and the supporting substrate is small and an inversion layer formed at a bottom of the active layer in the conventional SOI substrate is prevented from being induced. The power IC is constituted at least by an element A in a first active layer and an element B in a second active layer operating in association with the element A. The first active layer is electrically connected to the SOI conductive film just under the first and second active layers. A potential difference is prevented from being applied to the second active layer of the element B upon operation of the element A. With this arrangement, even if an operating voltage of the power IC is raised, independent operation of each element is retained. Furthermore, a low on-resistance of an output stage power-element is realized, and the device characteristics such as high speed operation and high conversion efficiency are provided.
REFERENCES:
patent: 4974041 (1990-11-01), Grinberg
patent: 5306942 (1994-04-01), Fujii
IEEE Transactions on electron Devices, vol. 40, No. 11, Nov. 1993, "An intelligent Power IC with Double buried-oxide layers formed by SIMOX technology" by Ohno et al., P,2074-P,2080.
Takagi Yosuke
Takeuchi Yoshinori
Kabushiki Kaisha Toshiba
Loke Steven H.
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