Power delivery package having through wafer vias

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material

Reexamination Certificate

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C257S774000

Reexamination Certificate

active

07615487

ABSTRACT:
An integrated circuit chip package and a method of manufacture thereof are provided. In one embodiment, the integrated circuit chip package comprises a semiconductor die having power and ground routings, a plurality of through wafer vias disposed within the semiconductor die, the through wafer vias connected to the power and ground routings, and a substrate attached to the semiconductor die, the substrate having power and ground leads connected to the through wafer vias for transferring power from the substrate to the semiconductor die.

REFERENCES:
patent: 6924551 (2005-08-01), Rumer et al.
patent: 6967556 (2005-11-01), Gaschke et al.
patent: 2005/0184390 (2005-08-01), Gagne et al.
patent: 2007/0176281 (2007-08-01), Kim et al.
patent: 2007/0220207 (2007-09-01), Black et al.
patent: 2008/0179758 (2008-07-01), Wong et al.
patent: 2006-228897 (2006-08-01), None

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