Potential analyzer

Details Potential analyzer Potential analyzer

1984-06-21

1986-12-16

Anderson, Bruce C.

Radiant energy

Inspection of solids or liquids by charged particles

Electron probe type

324158R, G01N 2300

Patent

active

046298894

ABSTRACT:
A potential analyzer for analyzing a potential at a specimen such as an LSI device or the like. This analyzer comprises: a detector to detect secondary electrons to be emitted from a specimen by radiating a primary electron beam thereto; a retarding grid, provided between the specimen and the detector, for controlling a detection amount of the secondary electrons; a circuit for applying a voltage to the retarding grid to keep the output of the secondary electron detector at a constant value; and a setting circuit for automatically setting the gain of the detector so as to allow an operating range of the voltage to the retarding grid to be within a specified value.

REFERENCES:
patent: 3646344 (1972-02-01), Plows
patent: 3714424 (1973-01-01), Weber
patent: 4277679 (1981-07-01), Feuerbaum

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