Post singulation die separation apparatus and method for...

Adhesive bonding and miscellaneous chemical manufacture – Differential fluid etching apparatus – With microwave gas energizing means

Reexamination Certificate

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C156S583200, C438S464000

Reexamination Certificate

active

07045035

ABSTRACT:
A post singulation, die separation assembly for bulk separation of a plurality of dice in a singulated wafer from the adhesive backing of wafer saw tape. The die separation assembly includes a support base having a support surface. A feed tray includes a collection end positioned adjacent the base such that an elongated, substantially tin gap is formed between the tray collection end and at least a portion of the base. A flexible platform is movably supported atop the base support surface for movement along the base. Upon movement of the flexible platform down the down-ramped portion of the support base, a portion of the wafer saw tape thereat is peeled away from the respective die. The tape is the separated from the dice, releasing the respective dice onto the collection end of the feed tray in a manner substantially maintaining their forward alignment orientation of thereof.

REFERENCES:
patent: 4798645 (1989-01-01), Pak
patent: 5399228 (1995-03-01), Schroeder et al.
patent: 5482899 (1996-01-01), McKenna et al.
patent: 6364089 (2002-04-01), Singh et al.
patent: 2003/0071051 (2003-04-01), Martinsen
Patent Abstracts of Japan, Publication No. 52-027352,Sheet Separation Device, Sato Akihiko, et al., filed Aug. 27, 1975.

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