Positive-working resist composition

Details Positive-working resist composition Positive-working resist composition

2005-09-06

2005-09-06

Le, Hoa Van (Department: 1752)

Radiation imagery chemistry: process, composition, or product th

Imaging affecting physical property of radiation sensitive...

Radiation sensitive composition or product or process of making

C430S913000, C526S242000, C526S280000, C526S281000

Reexamination Certificate

active

06939662

ABSTRACT:
A positive-working resist composition comprising:(A1) a resin containing a repeating unit represented by the specific formula, which increases the solubility in an alkali developing solution by the action of an acid, and(B) a compound capable of generating an acid upon irradiation with one of actinic rays and radiation.

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