Radiation imagery chemistry: process – composition – or product th – Imaging affecting physical property of radiation sensitive... – Radiation sensitive composition or product or process of making
Patent
1990-04-10
1991-12-31
Brammer, Jack P.
Radiation imagery chemistry: process, composition, or product th
Imaging affecting physical property of radiation sensitive...
Radiation sensitive composition or product or process of making
430271, 430326, 522 31, 522127, 522154, G03C 176
Patent
active
050771744
ABSTRACT:
This invention relates to positive working resist compositions having utility in dry film photoresists and to fully aqueous methods for developing and stripping them.
REFERENCES:
patent: 4316046 (1982-04-01), Dossell
patent: 4678737 (1987-07-01), Schneller et al.
patent: 4898803 (1990-02-01), Aoai et al.
patent: 4951379 (1990-06-01), Brunsvold et al.
Bauer Richard D.
Chen Gwendyline Y.
Hertler Walter R.
Wheland Robert C.
Brammer Jack P.
E. I. Du Pont de Nemours and Company
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