Radiation imagery chemistry: process – composition – or product th – Imaging affecting physical property of radiation sensitive... – Making electrical device
Reexamination Certificate
2005-07-19
2005-07-19
Duda, Kathleen (Department: 1756)
Radiation imagery chemistry: process, composition, or product th
Imaging affecting physical property of radiation sensitive...
Making electrical device
C430S331000
Reexamination Certificate
active
06919167
ABSTRACT:
A method for carrying out positive tone lithography with a carbon dioxide solvent system is carried out by (a) providing a substrate having a polymer resist layer formed thereon; (b) exposing at least one portion of the polymer resist layer to radiant energy to form at least one light field region in the polymer resist layer; and then (c) contacting the polymer resist layer to a carbon dioxide solvent system, the solvent system preferably comprising a polar group, under conditions in which the at least one light field region is preferentially removed.
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International Search Report for PCT/US03/36670; Date of Mailing Jan. 10, 2005.
DeYoung James
McClain James B.
Duda Kathleen
MiCell Technologies
Myers Bigel Sibley & Sajovec, PA.
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