Positive resist terpolymer composition and method of forming res

Details Positive resist terpolymer composition and method of forming res Positive resist terpolymer composition and method of forming res

1979-07-02

1981-06-16

Brammer, Jack P.

Radiation imagery chemistry: process, composition, or product th

Imaging affecting physical property of radiation sensitive...

Radiation sensitive composition or product or process of making

427 431, 430296, 430326, 430942, 526291, G23C 168

Patent

active

042738563

ABSTRACT:
PCT No. PCT/JP78/00021 Sec. 371 Date July 2, 1979 Sec. 102(e) Date July 7, 1979 PCT Filed Nov. 6, 1978 PCT Pub. No. WO79/00283 PCT Pub. Date May 31, 1979
A cross-linkable positive-working ionizing radiation-resist or ultraviolet ray-resist polymer composition comprising, in polymerized form,

REFERENCES:
patent: 3981985 (1976-09-01), Roberts
patent: 4061832 (1977-12-01), Roberts

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