Positive resist polymer composition and method of forming resist

Details Positive resist polymer composition and method of forming resist Positive resist polymer composition and method of forming resist

1980-12-03

1982-08-17

Brammer, Jack P.

Radiation imagery chemistry: process, composition, or product th

Imaging affecting physical property of radiation sensitive...

Radiation sensitive composition or product or process of making

20415914, 427 431, 430296, 430302, 430329, 430942, 526231, 526317, G03C 169

Patent

active

043450202

ABSTRACT:
A cross-linkable positive-working ionizing radiation-resist or ultraviolet ray-resist polymer composition including: in polymerized form,

REFERENCES:
patent: 3981985 (1976-09-01), Roberts
patent: 3984581 (1976-10-01), Feder et al.
patent: 4061832 (1977-12-01), Roberts
patent: 4156745 (1979-05-01), Hatzakis et al.
patent: 4273856 (1981-06-01), Yoneda et al.
patent: 4276365 (1981-06-01), Yoneda et al.

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