Radiation imagery chemistry: process – composition – or product th – Imaging affecting physical property of radiation sensitive... – Radiation sensitive composition or product or process of making
Reexamination Certificate
2006-09-20
2008-11-11
Kelly, Cynthia H. (Department: 1795)
Radiation imagery chemistry: process, composition, or product th
Imaging affecting physical property of radiation sensitive...
Radiation sensitive composition or product or process of making
C430S907000, C430S281100, C430S286100, C430S326000, C522S156000, C522S154000
Reexamination Certificate
active
07449277
ABSTRACT:
A polymer is obtained from (meth)acrylate having a bridged ring lactone group, (meth)acrylate having an acid-labile leaving group, and (meth)acrylate having a hydroxynaphthyl pendant. A positive resist composition comprising the polymer as a base resin, when exposed to high-energy radiation and developed, exhibits a high sensitivity, a high resolution, and a minimal line edge roughness due to controlled swell during development, and leaves minimal residues following development.
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Hatakeyama Jun
Nagata Takeshi
Takeda Takanobu
Kelly Cynthia H.
Rummel Ponder N Thompson
Shin-Etsu Chemical C., Ltd
Westerman, Hattori, Daniels & Adrian , LLP.
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