Positive radiation-sensitive mixture containing monomeric acid-c

Details Positive radiation-sensitive mixture containing monomeric acid-c Positive radiation-sensitive mixture containing monomeric acid-c

1988-09-13

1991-08-06

McCamish, Marion E.

Radiation imagery chemistry: process, composition, or product th

Imaging affecting physical property of radiation sensitive...

Radiation sensitive composition or product or process of making

430326, 430177, 430176, G03C 172

Patent

active

050377213

ABSTRACT:
A positive radiation-sensitive mixture is disclosed containing a compound which forms an acid under the influence of actinic radiation, and an acid-cleavable compound, wherein the acid-cleavable compound is monomeric and contains an acetal group whose aldehyde or ketone component has a developer solubility of about 0.1 to 100 g/l and a boiling point above about 150.degree. C. The mixture does not exhibit different development properties, even at different "holding times", and therefore exhibits a wide processing latitude and makes possible a high structural resolution.

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