Positive photosensitive composition and method of forming...

Radiation imagery chemistry: process – composition – or product th – Imaging affecting physical property of radiation sensitive... – Radiation sensitive composition or product or process of making

Reexamination Certificate

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C430S326000, C430S905000, C430S910000

Reexamination Certificate

active

08080361

ABSTRACT:
A positive photosensitive composition includes: a resin (A) whose dissolution rate in an alkaline developing solution increases by the action of an acid, the resin (A) containing an acid decomposable repeating unit represented by a general formula (I) and an acid nondecomposable repeating unit represented by a general formula (II); and a compound (B) capable of generating an acid upon irradiation with one of active rays and radiations:wherein Xa1represents one of a hydrogen atom, an alkyl group, a cyano group, and a halogen atom, A1represents one of a single bond and a divalent connecting group, ALG represents an acid leaving hydrocarbon group, Xa2represents one of a hydrogen atom, an alkyl group, a cyano group, and a halogen atom, A2represents one of a single bond and a divalent connecting group, and ACG represents an acid nonleaving hydrocarbon group.

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