Radiation imagery chemistry: process – composition – or product th – Imaging affecting physical property of radiation sensitive... – Radiation sensitive composition or product or process of making
Patent
1998-09-14
2000-08-08
Baxter, Janet
Radiation imagery chemistry: process, composition, or product th
Imaging affecting physical property of radiation sensitive...
Radiation sensitive composition or product or process of making
430906, 430910, 430907, 430905, G03C 173, G03C 1675, G03F 7004
Patent
active
061000086
ABSTRACT:
The present invention is a positive acting photoresist composition which includes a positive acting photoactive component and a dimethyl aniline component. The positive acting photoactive component includes at least one positive acting photoactive polymeric compound. The photoactive polymeric compound contains groups having the 2,6-dinitro structure ##STR1## or a 2,5-dinitro structure ##STR2## where X and Y may be the same or different member selected from the group consisting of: halogen, --OR, --O--SO.sub.2 R, --SR, --NRR', --OC.dbd.ONHR, --OC.dbd.OOR, --OSiRR'O and --OC.dbd.OR; and where R and R' may be hydrogen or any of a wide variety of organic substituents, including substituted or unsubstituted alkyl, aryl, substitutents. The photoactive component may also include a photoactive monomeric compound which contains groups having the 2,6-dinitro structure (1) and/or the 2,5-dinitro structure (2) set out above. The dimethyl aniline component includes a N,N-dimethyl aniline compound.
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CA 88:21572, Orientation Effects on Charge-Transfer Interactions, VIII. Diastereomeric 4,7-Dimethoxy-12,15-Dinitro [2.2]Paracyclophanes; Chem. Ber. (1977), 110(10), 3358-65.
CA 82:138696, (1974), (49/50), 4397-400; Orientation Effects in Charge Transfer Interactions. IV. The Two Diastereoisomers of 4,7-Dimethoxy-12,15-Dinitro [2.2] Paracyclophane.
Berichte Der Deutschen Chemischen Gesellschaft, vol. 110, 1977, Weinheim DE, pp. 3358-3365, H.A. Staab et al., "Diastereomere 4,7-Dimethoxy-12,15-Dinitro (2.2)Paracyclophane".
Baxter Janet
Chirgott Paul S.
Lee Sin J.
PPG Industries Ohio Inc.
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