Positive photoresist with improved contrast ratio and photospeed

Radiation imagery chemistry: process – composition – or product th – Imaging affecting physical property of radiation sensitive... – Radiation sensitive composition or product or process of making

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430906, 430910, 430907, 430905, G03C 173, G03C 1675, G03F 7004

Patent

active

061000086

ABSTRACT:
The present invention is a positive acting photoresist composition which includes a positive acting photoactive component and a dimethyl aniline component. The positive acting photoactive component includes at least one positive acting photoactive polymeric compound. The photoactive polymeric compound contains groups having the 2,6-dinitro structure ##STR1## or a 2,5-dinitro structure ##STR2## where X and Y may be the same or different member selected from the group consisting of: halogen, --OR, --O--SO.sub.2 R, --SR, --NRR', --OC.dbd.ONHR, --OC.dbd.OOR, --OSiRR'O and --OC.dbd.OR; and where R and R' may be hydrogen or any of a wide variety of organic substituents, including substituted or unsubstituted alkyl, aryl, substitutents. The photoactive component may also include a photoactive monomeric compound which contains groups having the 2,6-dinitro structure (1) and/or the 2,5-dinitro structure (2) set out above. The dimethyl aniline component includes a N,N-dimethyl aniline compound.

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CA 88:21572, Orientation Effects on Charge-Transfer Interactions, VIII. Diastereomeric 4,7-Dimethoxy-12,15-Dinitro [2.2]Paracyclophanes; Chem. Ber. (1977), 110(10), 3358-65.
CA 82:138696, (1974), (49/50), 4397-400; Orientation Effects in Charge Transfer Interactions. IV. The Two Diastereoisomers of 4,7-Dimethoxy-12,15-Dinitro [2.2] Paracyclophane.
Berichte Der Deutschen Chemischen Gesellschaft, vol. 110, 1977, Weinheim DE, pp. 3358-3365, H.A. Staab et al., "Diastereomere 4,7-Dimethoxy-12,15-Dinitro (2.2)Paracyclophane".

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