Radiation imagery chemistry: process – composition – or product th – Diazo reproduction – process – composition – or product – Composition or product which contains radiation sensitive...
Patent
1998-01-27
1999-08-24
Chu, John S.
Radiation imagery chemistry: process, composition, or product th
Diazo reproduction, process, composition, or product
Composition or product which contains radiation sensitive...
430165, 430193, 430320, 430324, 430329, G03F 7023, G03F 730
Patent
active
059423692
ABSTRACT:
A positive photoresist composition including (A) 100 parts by weight of an alkali-soluble novolak resin, and based thereon; (B) 5 to 50 parts by weight of an alkali-soluble acrylic resin containing, as s, 10 to 80% by weight of a unit of a radical-polymerizable compound having an alcoholic hydroxyl group and 3 to 50% by weight of at least one of a unit of a radical-polymerizable compound having a carboxyl group and a unit of a radical-polymerizable compound having a phenolic hydroxyl group; (C) 5 to 100 parts by weight of a quinonediazide group-containing compound; and (D) a solvent, is provided. This composition has a good adhesion to substrates at the time of development and a good plating solution resistance and moreover can be well wetted with plating solutions, can be well developed with alkali developing solutions and can be well stripped from substrates at the resist unexposed areas, and is suited for the formation of thick films suitable as bump forming materials.
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Patent Abstracts of Japan, vol. 17, No. 461 (P-1598), Aug. 23, 1993, JP 5-107752, Apr. 30, 1993.
Derwent Abstracts, AN 95-220896, JP 7-133449, May 23, 1995.
Ohta Masaru
Ota Toshiyuki
Sano Kimiyasu
Sato Hozumi
Chu John S.
JSR Corporation
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