Positive image-forming process utilizing glass substrate with ox

Details Positive image-forming process utilizing glass substrate with ox Positive image-forming process utilizing glass substrate with ox

1992-03-06

1994-05-03

Bowers, Jr., Charles L.

Radiation imagery chemistry: process, composition, or product th

Imaging affecting physical property of radiation sensitive...

Making electrical device

430166, 430191, 430275, 430323, 430326, G03F 730, G03F 740

Patent

active

053087437

ABSTRACT:
A positive-type photoresist composition is disclosed, which comprises:

REFERENCES:
patent: 4271251 (1981-06-01), Aotani et al.
patent: 4279982 (1981-07-01), Iwasaki et al.
patent: 4853314 (1989-08-01), Ruckert et al.
patent: 4963463 (1990-10-01), Koshiba et al.

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