Radiation imagery chemistry: process – composition – or product th – Imaging affecting physical property of radiation sensitive... – Radiation sensitive composition or product or process of making
Patent
1997-03-12
1998-10-27
Chu, John S.
Radiation imagery chemistry: process, composition, or product th
Imaging affecting physical property of radiation sensitive...
Radiation sensitive composition or product or process of making
430170, 430176, 430191, 430192, 430193, 430905, G03F 7004
Patent
active
058276343
ABSTRACT:
The invention comprises an acid hardened resist system consisting of a resin binder having acid labile blocking groups and inert blocking groups and a photoacid generator. The inclusion of inert blocking groups on the resin improves shelf life without deleteriously affecting photolithographic properties of the resist.
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Ablaza Sheri L.
Denison Mark D.
Sinta Roger F.
Thackeray James W.
Chu John S.
Goldberg Robert L.
Shipley Company L.L.C.
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