Positioning mechanism and method for providing coaxial alignment

Details Positioning mechanism and method for providing coaxial alignment Positioning mechanism and method for providing coaxial alignment

1994-01-21

1996-01-09

Anderson, Bruce C.

Radiant energy

Inspection of solids or liquids by charged particles

Analyte supports

250306, 2504911, G21K 510, H01J 3700

Patent

active

054830648

ABSTRACT:
A scanning microscope wherein the probe operates at all times in alignment with the piezoelectric element providing the scanning motion. A sample is slidably connected to the piezoelectric element and the target area on the sample is positioned substantially coaxially with the probe and the scanning element prior to commencement of the scanning operation. A particular embodiment of a sample positioner is provided that eliminates any interference by the positioner with the sample during scanning.

REFERENCES:
patent: 4877957 (1989-10-01), Okada et al.
patent: 4968914 (1990-11-01), West et al.
patent: 5117110 (1992-05-01), Yasutaki
patent: 5260577 (1993-11-01), Abraham et al.
patent: 5286977 (1994-02-01), Yokayama et al.
patent: 5306919 (1994-04-01), Elings et al.
patent: 5360974 (1994-11-01), Hammond et al.
Jahanmir, J. et al., "Scanning Microscopy" vol. 6, No. 3, 1992 (pp. 625-660).

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