Positioning device with a vibration-free object table, and litho

Photocopying – Projection printing and copying cameras – Detailed holder for photosensitive paper

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355 53, 355 75, G03B 2758, G03B 2742, G03B 2762

Patent

active

058446664

ABSTRACT:
A positioning device with a drive unit with which an object table is displaceable over a guide which is fastened to a first frame thereof. A stationary part of the drive unit is fastened to a second frame thereof and dynamically isolated from the first frame while a reaction force of the object table arising from a driving force exerted by the drive unit on the object table is transmittable exclusively into the second frame.

REFERENCES:
patent: 5172160 (1992-12-01), Van Eijk et al.
patent: 5187519 (1993-02-01), Takabayashi et al.
patent: 5194893 (1993-03-01), Nishi
patent: 5260580 (1993-11-01), Itoh et al.
patent: 5359389 (1994-10-01), Isohata
patent: 5446519 (1995-08-01), Makinouchi

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