Electrical generator or motor structure – Non-dynamoelectric – Piezoelectric elements and devices
Patent
1988-06-13
1989-10-03
Budd, Mark O.
Electrical generator or motor structure
Non-dynamoelectric
Piezoelectric elements and devices
310330, 310366, 310317, H01L 4108
Patent
active
048719382
ABSTRACT:
A piezoelectric positioning device for controlling the three dimensional horizontal and vertical movement of a tip relative to the sample in a scanning tunneling microscope. A thin walled cone or cylinder shaped member formed of piezoelectric material having an outer surface and an inner surface. A tip member positioned at the bottom of the cone or cylindrical member. A plurality of substantially similar electrode members positioned around one of the surfaces of the cone or cylinder shaped member to form opposite pairs of electrodes to control the horizontal movement of the tip in two of the three dimensions in accordance with voltages applied to the pairs of electrodes. A unitary member positioned around the other of the surfaces of the cone or cylinder shaped member to form a unitary electrode to control the vertical movement of the tip in the third dimension in accordance with voltage applied to the unitary electrode.
REFERENCES:
patent: 3720849 (1973-03-01), Bardocz
patent: 3865997 (1975-02-01), Halter
patent: 4087715 (1978-05-01), Myer
patent: 4525852 (1985-06-01), Rosenberg
patent: 4607166 (1986-08-01), Tamaki
patent: 4689516 (1987-08-01), Yokoyama et al.
patent: 4723086 (1988-02-01), Leibovich
Elings Virgil B.
Gurley John A.
Budd Mark O.
Digital Instruments, Inc.
Roston Ellsworth R.
Schwartz Charles H.
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