Positioning device comprising pre-stressed contactless bearings

Details Positioning device comprising pre-stressed contactless bearings Positioning device comprising pre-stressed contactless bearings

1985-06-05

1986-12-09

Dobeck, B.

Electricity: motive power systems

Positional servo systems

With particular 'error-detecting' means

318135, 318687, G05B 106

Patent

active

046282386

ABSTRACT:
A positioning device having a plate-shaped carrier (5) which is displaceable in a horizontal plane and which is journalled on a table (1) and on which is exerted a pressure and tensile force, respectively, by means of at least two translation drives (11, 13). The translation drives (11, 13) are coupled to the carrier (5) by means of horizontally operating static thrust and tensile bearings, respectively (33 to 41, 49), which transfer via a viscous medium in a contactless manner pressure and tensile forces respectively, between the carrier (5) and the translation drives (11, 13). The contactless bearings (33 to 41, 49) are pre-stressed with a force which is larger than the maximum occurring tensile force between the drives (11, 13) and the carrier (5). Thus, a substantially frictionless coupling is obtained between the drives (11, 13) and the carrier (5). This coupling acts at the same time as a guide for the carrier (5).

REFERENCES:
patent: Re27436 (1972-07-01), Sawyer
patent: 3466514 (1969-09-01), Brunner et al.
patent: 4485339 (1984-11-01), Trost
patent: 4506204 (1985-03-01), Galburt
patent: 4506205 (1985-03-01), Trost et al.
patent: 4507597 (1985-03-01), Trost

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