Pressure sensor apparatus with integrated circuit mounted thereo

Measuring and testing – Fluid pressure gauge – Diaphragm

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Details

73720, 73721, 73726, G01L 906

Patent

active

056294867

ABSTRACT:
A pressure sensor comprises a diaphragm mounted on a housing and subject to pressure. Stress sensitive resistors are connected to circuit traces on the diaphragm which in turn are wirebonded to a compensation IC. The IC is directly mounted on the diaphragm principally or wholly in an area which is not subject to flexing. A connector has a dome partially covering the diaphragm and holds terminal blades having ends extending away from the diaphragm and opposite ends carrying bond pads located adjacent the diaphragm. An opening in the dome permits wirebonder access to connect bond pads on the traces with terminal bond pads. A cover is installed over the connector and sensor.

REFERENCES:
patent: 3341794 (1967-09-01), Stedman
patent: 4965777 (1990-10-01), Timossi et al.
patent: 4993267 (1991-02-01), Allard et al.
patent: 5143888 (1992-09-01), Zylka et al.
patent: 5209122 (1993-05-01), Matly et al.

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