Positioning device and method of initializing a positioning...

Details Positioning device and method of initializing a positioning... Positioning device and method of initializing a positioning...

2008-05-20

2008-05-20

Nguyen, Kiet T. (Department: 2881)

Radiant energy

Inspection of solids or liquids by charged particles

Analyte supports

C355S072000, C074S490090

Reexamination Certificate

active

11557137

ABSTRACT:
In order to realize initializing sequences with high accuracy and high reproducibility, a positioning device according includes an XY slider movable in directions X and Y, an object position measuring device for measuring the position of the XY slider, an X beam guiding the XY slider in the direction Y and movable in the direction X, a Y beam guiding the XY slider in the direction X and movable in the direction Y, electromagnet units having at least two pairs of electromagnets provided on the XY slider in such a manner as to embrace side faces of the X beam and the Y beam, and a rotation regulating portion provided on the X beam for regulating the rotation of the X beam.

REFERENCES:
patent: 6639225 (2003-10-01), Kirschstein et al.
patent: 6788385 (2004-09-01), Tanaka et al.
patent: 7030964 (2006-04-01), Akutsu et al.
patent: 2004/0112164 (2004-06-01), Asano et al.
patent: 2006/0028310 (2006-02-01), Asano et al.
patent: 5-64487 (1993-03-01), None
patent: 11-316607 (1999-11-01), None

Affiliated with

Also associated with

Rating

Positioning device and method of initializing a positioning... does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Positioning device and method of initializing a positioning..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Positioning device and method of initializing a positioning... will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-3927241