Positioning device

Details Positioning device Positioning device

1993-01-25

1994-02-15

Berman, Jack I.

Radiant energy

Inspection of solids or liquids by charged particles

Analyte supports

250306, 73105, H01J 3720

Patent

active

052869776

ABSTRACT:
Disclosed is a positioning device comprising an X-Y scanning mechanism capable of scanning and driving in planar directions and a Z-scanning mechanism capable of scanning and driving in a direction perpendicular to the planar directions. A sample table is affixed to the moving part of the Z-scanning mechanism, and the housing of the probe head is fixed to the casing of the positioning device through a plate spring. The housing abuts against a plane formed in the moving part of the X-Y scanning mechanism through three point contact legs such that the resonance frequency of the entire device can be set high, thereby realizing a high anti-vibration effect and stable probe scanning. The housing of the probe head abuts against said plane formed in the moving part of the X-Y scanning mechanism through three ball bearings composing the three point contact legs, and is mounted on the fixed table through a thin plate spring.

REFERENCES:
patent: 4908519 (1990-03-01), Park et al.
patent: 4947042 (1990-08-01), Nishioka et al.
patent: 5103095 (1992-04-01), Elings et al.

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