Positioning apparatus for substrates to be processed

Details Positioning apparatus for substrates to be processed Positioning apparatus for substrates to be processed

1997-04-22

1999-11-09

Ellis, Christopher P.

Material or article handling

Article reorienting device

Orienter has article gripping means

414936, 414941, 414938, B65G 4907

Patent

active

059801956

ABSTRACT:
An apparatus is provided with a plurality of stages of mounting bases on each of which is disposed upwardly orientated, narrow tapered pins around the periphery of a semiconductor wafer, and a plurality of stages of turntables, one for each of the mounting bases, with the mounting bases being capable of moving independently of the turntables. When a wafer is transferred from a transporter arm to the tapered pins, the peripheral edge of the wafer comes into contact with the inner peripheral surfaces of the tapered pins and the wafer is centered thereby. The turntable then picks up the wafer and aligns the orientation thereof. This makes it possible to position the centers of a plurality of wafers and position the orientations thereof in a simple manner.

REFERENCES:
patent: 5162047 (1992-11-01), Wada
patent: 5445486 (1995-08-01), Kitayama et al.
patent: 5479108 (1995-12-01), Cheng
patent: 5549444 (1996-08-01), Dubuit
patent: 5565034 (1996-10-01), Nanbu et al.
patent: 5636964 (1997-06-01), Somekh et al.
patent: 5647626 (1997-07-01), Chen et al.
patent: 5655871 (1997-08-01), Ishii et al.
patent: 5669644 (1997-09-01), Kaihotsu et al.
patent: 5669752 (1997-09-01), Moon
patent: 5700046 (1997-12-01), Van Doren et al.
patent: 5711646 (1998-01-01), Ueda et al.
patent: 5711647 (1998-01-01), Slocum
patent: 5851102 (1998-12-01), Okawa et al.

Affiliated with

Also associated with

Rating

Positioning apparatus for substrates to be processed does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Positioning apparatus for substrates to be processed, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Positioning apparatus for substrates to be processed will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-1447534