Measuring and testing – Surface and cutting edge testing – Roughness
Reexamination Certificate
2011-08-23
2011-08-23
Larkin, Daniel (Department: 2856)
Measuring and testing
Surface and cutting edge testing
Roughness
C073S001890, C850S001000, C850S002000, C850S003000
Reexamination Certificate
active
08001831
ABSTRACT:
There is provided a scanning probe microscope employing a positioning apparatus M1including a unit to be driven in XY direction having a substantially square form in plane geometry at the center of the plane in the XY directions and having a first elastic support that bends in the X-axis direction at least on one side of the square form and a second elastic support that bends in the Y-axis direction at least on one side orthogonal to the side and a support unit that supports a stage unit1in the XY directions such that the facing surface can face in parallel against the facing surface of the unit to be driven in the XY directions. The positioning apparatus has a space of a predetermined thickness between the surface corresponding to the unit to be driven in the XY directions at least and the facing surface of the support unit that faces against it, and the space is filled with a viscosity agent.
REFERENCES:
patent: 5286977 (1994-02-01), Yokoyama et al.
patent: 5297130 (1994-03-01), Tagawa et al.
patent: 6085581 (2000-07-01), Jones et al.
patent: 6229607 (2001-05-01), Shirai et al.
patent: 7024925 (2006-04-01), Gweon et al.
patent: 7278298 (2007-10-01), Hansma et al.
patent: 2007/0085022 (2007-04-01), Ue
patent: 10-339735 (1998-12-01), None
patent: 2001-330425 (2001-11-01), None
JPO web site: Hyojun-Gijutsusyu > Heisei 14 nendo: Hyomenkozo no Genshi ryoiki bunseki, “1-A-1-a Sousa-gata Tunnel Kenbikyo (Scanning Tunneling Microscope)”, pp. 1-3 [http://www.jpo.go.jp/shiryou/s—sonota/hyoujun—gijutsu/spm/1—a—1—a.htm], Mar. 28, 2003.
Watanabe Masafumi
Yasutake Masatoshi
Brinks Hofer Gilson & Lione
Larkin Daniel
SII Nano Technology Inc.
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