Position sensor system for substrate holders

Details Position sensor system for substrate holders Position sensor system for substrate holders

1996-05-22

1998-12-01

Font, Frank G.

Optics: measuring and testing

By alignment in lateral direction

356400, G01B 1100

Patent

active

058446834

ABSTRACT:
The position sensor (20) and method of the present invention allows detecting proper placement of substrate holders (25) in a processing apparatus (35), and can also be used to detect displacement of the substrates (70) within the substrate holder (25). The position sensor (20) comprises (a) an optical emitter (120) capable of emitting a light beam, (b) an optical sensor (125) capable of sensing the light beam emitted by the optical emitter (120), and (c) a light regulator (130) in a path (135) of the light beam that is capable of blocking the light beam from the optical sensor when the substrate holder (25) is improperly positioned in the process chamber (40).

REFERENCES:
patent: 4657620 (1987-04-01), Davis et al.
patent: 4776744 (1988-10-01), Stonestreet et al.
patent: 5442163 (1995-08-01), Nakahara et al.
patent: 5483138 (1996-01-01), Shmookler et al.
patent: 5563798 (1996-10-01), Berken et al.

Affiliated with

Also associated with

Rating

Position sensor system for substrate holders does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Position sensor system for substrate holders, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Position sensor system for substrate holders will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-2399880