Position measurement system and lithographic apparatus

Details Position measurement system and lithographic apparatus Position measurement system and lithographic apparatus

2006-08-14

2009-10-06

Nguyen, Hung Henry (Department: 2851)

Photocopying

Projection printing and copying cameras

Step and repeat

C355S055000

Reexamination Certificate

active

07599043

ABSTRACT:
A position measurement system includes a first position measurement unit configured to measure a position of an object in a first and a second direction, the first position measurement unit including a first sensor and a first grating that extends in a first direction, a second position measurement unit configured to measure the position of the object in the first and the second direction, the second position measurement unit including a second sensor and a second grating that extends in the first direction. The position measurement system is configured to initialize the second position measurement unit based on a position measurement of the first position measurement unit.

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European Search Report for European Patent Application No. EP 06 07 6536, dated Dec. 8, 2006.
Examination Report issued on Jan. 19, 2009 in Singapore Application No. 200606018-0.

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