Position detecting system and method

Details Position detecting system and method Position detecting system and method

2006-03-28

2006-03-28

Berman, Jack I. (Department: 2881)

Radiant energy

Inspection of solids or liquids by charged particles

Electron probe type

C250S491100

Reexamination Certificate

active

07019293

ABSTRACT:
In a position detecting system and method, an electron beam is irradiated to a sample including a portion to be measured, and the electron beam is caused to move in relation to the portion to be measured in the sample. Furthermore, a voltage is applied to the sample which is scanned by the electron beam, and a current flowing in the sample because of the applied voltage, is detected. Thus, the position of the portion to be measured can be determined from a scanning start position of the electron beam and the position where the detected current changes.

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